Application of Scattering Parameters to DPL Time-Lag Parameter Estimation at Nanoscale in Modern Integration Circuit Structures

نویسندگان

چکیده

This paper presents the methodology of material parameters’ estimation for dual-phase-lag (DPL) model at nanoscale in modern integration circuit (IC) structures. The analyses and measurements performed were used unique dedicated micro-electro-mechanical system (MEMS) test structure. electric thermal domain this structure was analysed. Finally, silicon dioxide (SiO2) temperature time-lag procedure is presented based on scattering parameters measured by a vector network analyser considered MEMS together with 2-omega method. proposed has ability to estimate parameter high accuracy also suitable other manufacturing process technologies ICs insulation materials integrated circuits such as nitride (Si3N4), titanium (TiN), hafnium (HfO2).

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Two-step Smoothing Estimation of the Time-variant Parameter with Application to Temperature Data

‎In this article‎, ‎we develop two nonparametric smoothing estimators for parameter of a time-variant parametric model‎. ‎This parameter can be from any parametric family or from any parametric or semi-parametric regression model‎. ‎Estimation is based on a two-step procedure‎, ‎in which we first get the raw estimate of the parameter at a set of disjoint time...

متن کامل

the role of application of dynamic assessment approach in improvement of iranian efl writing performance at different language proficiency levels

the present study sought to investigate the role of dynamic assessment (da) in improvement of iranian efl writing performance at different language proficiency levels. to this end, after conducting the quick placement test, 60 iranian efl learners were assigned to two groups with different language proficiency levels. in both groups each participant wrote two compositions, one before and one af...

Time-varying parameter estimation with application to trajectory tracking

Purpose – This paper is concerned with an online parameter estimation algorithm for nonlinear uncertain time-varying systems for which no stochastic information is available. Design/methodology/approach – The estimation procedure, called nonlinear learning rate adaptation (NLRA), computes an individual adaptive learning rate for each parameter instead of using a single adaptive learning rate fo...

متن کامل

Application of Model-Based Estimation to Time-Delay Estimation of Ultrasonic Testing Signals

Time-Delay-Estimation (TDE) has been a topic of interest in many applications in the past few decades. The emphasis of this work is on the application of model-based estimation (MBE) for TDE of ultrasonic signals used in ultrasonic thickness gaging. Ultrasonic thickness gaging is based on precise measurement of the time difference between successive echoes which reflect back from the back wall ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Energies

سال: 2021

ISSN: ['1996-1073']

DOI: https://doi.org/10.3390/en14154425